You have chosen highlight destinations.
Logistics are important so I am going to suggest a few tweaks to the plan.
While it is likely that you will make that connection from Athens to Naxos most experienced travellers suggest you should have 2 hours to make connections in Athens.
The ferry routes depart Crete in the morning go to Santorini late morning and on to Naxos early afternoon. When they finish their routes the turn around and make the same stops in reverse getting back to Heraklion at 7 pm. You pretty much loose a minimum of a half day for every ferry hop.
I said all that to say, I would fly to Chania immediately on arrival in Athens. Find a hotel in Chania old town Venetian harbour. It is an amazing destination. You actually feel as if you have stepped into the past.
Drive to Heraklion Departing very early morning (its a good 2 hour drive) or go to Heraklion the night before. Perhaps visit Knossos, maybe the harbour fortress and wander around the central part of Heraklion.
Next morning take the ferry to Santorini. Spend your three nights there.
Ferry to Naxos, you will be on the beach by 2pm. I suggest you find a hotel at St George beach Agios Georgios. Its a good beach and is part of Naxos town. You get a beach experience with the town just a stroll along the sea headland.
Fly Naxos to Athens rent the car. Drive to Delphi. Plan to arrive late afternoon. Get a hotel and enjoy the village, visit the museum, perhaps visit the lower site which is open 24 hours. Next morning get up early and be at the gate at opening. You and a few others will have the site virtually alone. By the time the bus crowds arrive you will be in the upper part of the site and will have at least an hour before the crowds overrun the place. Now is a good time to leave.
Drive to Meteora. Its a long drive. You will likely arrive early evening. Take the opportunity to drive up to the Monasteries. Get your photos. Get up early next morning and beat the bus crowds. Visit one or two monasteries. Once the buses arrive it gets very busy. We counted 30 buses in one parking lot. Stay overnight and next morning get up early and do one more drive through and see if you can visit one or 2 more monasteries.
Drive to Nafplio. Enjoy the area. Nafplio is lovely. Be sure to take some time on your way back to Athens to stop in Coritnth. There is ancient Nemia with sister games with Olympia. The stadium is still there. Also near Ancient Corinth you will discover Acro Corinth. Its a mountain top fortress with 360 degree views.
You can do the land portion any way you want but the important logistical thing is to do Delphi first when you plan the Meteora portion of the trip. I put Nafplio last simply because it is so beautiful and you will be able to refresh yourselves before your time in Athens.
Here is your trip
Chania https://www.flickr.com/photos/stanbr54/albums/72157632117917828
Castello Heraklion https://www.flickr.com/photos/stanbr54/albums/72157686964935102
Heraklion https://www.flickr.com/photos/stanbr54/albums/72157655935354556
Santorini https://www.flickr.com/photos/stanbr54/albums/72157632154800782
Naxos town https://www.flickr.com/photos/stanbr54/albums/72157632094558042
Trip around Naxos https://www.flickr.com/photos/stanbr54/albums/72157634605629689
Naxos sunsets https://www.flickr.com/photos/stanbr54/albums/72157700728046481
Delphi and Meteora https://www.flickr.com/photos/stanbr54/albums/72157698930270992
Corinth Area. https://www.flickr.com/photos/stanbr54/albums/72157711755443483
Nafplio https://www.flickr.com/photos/stanbr54/albums/72157632094108982
Athens https://www.flickr.com/photos/stanbr54/albums/72157632121475515b
Have a great time.